Design and reactive magnetron sputtering of thermochromic coatings

Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

Synthesis and characterization of La2NiO4+δ coatings deposited by reactive magnetron sputtering using plasma emission monitoring

INVESTIGATION OF THE GROWTH MECHANISMS OF a-CHX COATINGS DEPOSITED BY PULSED REACTIVE MAGNETRON SPUTTERING

The study of the growth mechanisms of amorphous hydrogenated carbon coatings (aCHx) deposited by reactive pulsed magnetron discharge in Ar+C2H2, Ar+H2 and Ar+C2H2+H2 low pressure atmospheres is presented in this work. Hydrogen-containing species of the reactant gas affect the microstructure and surface properties of the a-CHx thin films. The dynamic scaling theory has been used to relate the ma...

UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)

The advantage of PARMS for the manufacturing of high performance low loss coatings is demonstrated with UVand VIS band pass filter based on HfO2 respectively Nb2O5 and SiO2.